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Chemical Sensors

NASA is developing chemical species sensors for aerospace applications including leak detection and emission, safety, human health, and environmental monitoring.

Overview

The Chemical Species Gas Sensors Team at NASA’s Glenn Research Center in Cleveland is developing microsensing technology for aerospace applications. Their approach is to implement sensitive and selective sensor systems capable of providing quantitative measurements of the environment, enabling better cognition and decision-making. The sensors can be used for leak detection and emission, safety, human health, and planetary exploration. The resulting sensor system is meant to be small, smart, and rugged with capabilities tailored for the targeted application.

The program develops four different types of sensor platforms for chemical sensing. One platform is a Schottky diode sensor structure for use in very sensitive measurements. Low concentrations of hydrogen and hydrocarbons can be detected using this basic structure. Three other platforms—resistive-based techniques, electrochemical cells, and nanoplasmonic structures—are used depending on the species and concentration range to be detected.

Producing sensor arrays using these platforms is an ongoing activity of this group. For example, one goal of this gas sensor research is to create a microfabricated gas sensor array operable at high temperatures such as in an emissions stream. Since one sensor will not be able to characterize multiple species in such an environment, an array of high-temperature sensors is necessary.

Close-up of a colorful microchip pattern under a microscope. The central blue section is surrounded by intricate, mirrored designs in orange and black hues, resembling symmetrical geometric shapes with sharp edges and reflective surfaces.
One embodiment of a microfabricated SiC-based hydrogen and hydrocarbon sensor.
NASA

This array, effectively a high-temperature electronic nose, is a significant step in allowing the monitoring and/or control of emissions produced by an aeronautic engine. The signals produced by this sensor array could be analyzed to determine the constituents of the emission stream.

This information could then be used to monitor changes in engine health or control those emissions. Sensor arrays have also been developed for other applications.

Sensor Platform Approach

These sensors are microfabricated using Microelectromechanical Systems (MEMS)-based technology to minimize size, weight, and power consumption. Nanostructures are used to improve the sensor response and stability and can be integrated into microstructures. A temperature detector and a heater are standardly included in the sensor structure to allow stable sensor operation at a variety of temperatures.

Mass fabrication of the sensors using silicon-processing technology is envisioned to minimize the cost per sensor. The program develops four different types of base sensor platforms. One platform is a Schottky diode sensor structure for use in very sensitive measurements. Two other platforms—resistor-based techniques and electrochemical cells—are used depending on the gas and concentration range to be detected. Another platform takes advantage of the unique capabilities provided by nanoplasmonic sensors.

These sensor platforms are foundations on which a wide range of species may be measured by choice of materials and operating parameters. For example, the electrochemical cell platform can be modified to produce an oxygen sensor or a carbon dioxide sensor depending on the electrolyte, materials, and operating temperature.

Integration into Smart Sensor Systems

The sensors developed from these platforms allow the detection of a range of species including hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide in a variety of ambient gas conditions and temperatures. A core foundation of this work is the integration of these sensors, either individually or in a sensor array, into Smart Sensor Systems.

A Smart Sensor System, as conceived of here, is a complete self-contained sensor system that includes multiparameter sensing, data logging, processing and analysis, self-contained power, and an ability to transmit or display information.

Multiparameter information is obtained to understand the environment. Local processing is used to optimize the quality and relevance of that information, and then it is communicated in a manner that best fits the application. The approach has been to develop “Lick and Stick” technology that can be stand-alone and applied wherever and whenever necessary.

Wide Range of Applications

The application range of this technology has been broad and impactful. Applications over time have included leak detection, fire and environmental monitoring, engine emissions, human breath and exercise monitoring, and cryogenic fuel line monitoring.

The work has often involved collaborators such as Case Western Reserve University and The Ohio State University, as well as hardware development in NASA’s Small Business Innovation Research (SBIR) and Small Business Technology Transfer (STTR) program by Makel Engineering Inc.

Applications of the technology developed in this work range from the International Space Station to the surface of Venus. This page provides a sampling of the sensors, sensor arrays, and their applications.

Selected Awards

  • NASA Inventors Hall of Fame (2024)
  • NASA Invention of the Year Honorable Mention (2017)
  • Vehicle Integrated Propulsion Research (VIPR) Group Achievement Award (2016)
  • Abe Silverstein Medal for Exceptional Technical Achievement (2011)
  • Outstanding Paper of the Year, Sensors Review Journal (2011)
  • Nominated for NASA Invention of the Year (2009)
  • Nano 50 Award for Advancement of Nanotechnology (2008)
  • R&D 100 Award for Fire Detection System (2005)
  • NASA Turning Goals into Reality Associate Administrators Choice Award (2005)
  • NASA Turning Goals into Reality Safety Award (2003)
  • R&D 100 Award for Leak Detection System (1995)

Gas Sensors

Hydrogen Sensing

In launch applications, hydrogen leaks pose significant operational safety concerns. In response, NASA Glenn developed microfabricated point-contact hydrogen sensors for finding the position of the leaks. One component of this program involves the fabrication of palladium-alloy hydrogen sensors on silicon (Si) substrates. The hydrogen sensor includes a Schottky diode and a hydrogen sensitive resistor for detection from the parts per million (ppm) range to 100% hydrogen (shown below).

A close-up of an integrated circuit chip with gold pins and a purple central area, mounted on a white ceramic base against a dark background.
A silicon-based hydrogen sensor composed of both a hydrogen sensitive Schottky diode and resistor for a broad detection range.
NASA

The sensor includes a temperature detector and heater for operation in a wide variety of environments. It has high sensitivity and can operate in either inert or oxygen-containing environments. The operating range of the sensor can be designed from ppm to 100% hydrogen.

These sensors have been commercialized by Makel Engineering Inc. into a complete, wide range, leak detection system. They are part of a safety system on the International Space Station, have flown or been used in multiple applications, and are presently used by Blue Origin. These sensors are being considered for a future mission to Titan, Saturn’s icy moon. The basic platform structure can also be used for the detection of toxic gases such as hydrazine.

A second component of the program involves the use of silicon carbide (SiC) rather than silicon (Si) as the semiconductor in a Schottky diode structure. The use of SiC has been demonstrated for applications that require high-temperature detection of hydrogen in conditions in which Si-based technology will not function. High-temperature detection is further discussed in the Hydrocarbon Sensing Technology section.

Hydrocarbon Sensing

The detection of hydrocarbons is important in the monitoring of aeronautic engine exhaust, leak detection, and fire detection. For example, aeronautic gas emissions are often at temperatures considerably above the threshold where the silicon semiconductor hydrogen sensor is operable. Furthermore, it is at these higher temperatures that catalytic effects occur that often make hydrocarbon detection possible.

For these higher temperature applications, a Schottky diode using silicon carbide (SiC) rather than silicon (Si) semiconductor technology has been developed. The material properties of SiC make it suitable for operation in hostile conditions, which exceed the inherent limitations of Si-based electronic devices. In particular, the ability of SiC to operate as a semiconductor at temperatures higher than 600ºC makes it useful in high-temperature emission measuring applications, as well as for the development of high-temperature electronics.

A small electronic chip is placed next to a U.S. dime on a red surface, showing the chips tiny size in comparison to the coin. An arrow points to the chip with the text SiC Schottky diode gas sensor.
SiC Schottky diode gas sensor.
NASA

Thus, the use of a SiC rather than Si semiconductor in a Schottky diode structure allows this platform to be used at high temperatures. The use of precious metal catalysts in the Schottky diode structure allows the sensor to respond to hydrocarbons with high sensitivity. After notable development, the sensor has shown stability at high temperature for long durations. Further, the same sensor structure with internal temperature control can operate in applications that are not at high temperatures but also require the need for sensitive hydrogen or hydrocarbon detection.

A SiC-based Schottky diode hydrocarbon and hydrogen sensor package including a temperature detector and heater has been applied in multiple applications including leak detection, emissions monitoring, and fire detection. Advancements in this area have been patented and were nominated for NASA Invention of the Year in 2009 and received honorable mention for the 2017 NASA Invention of the Year. Present work includes integrating modifed versions of such sensors as these with SiC-based high-temperature electronics.

Nitrogen Oxide Sensing

NASA Glenn has developed multiple methods of nitrogen oxide (NOx) detection. One approach, in a previous collaboration with The Ohio State University, is based on a solid-state electrochemical NOx sensor for breath monitoring.

A small electronic chip with labeled dimensions of 3x4 mm and 10x12 mm is shown next to a quarter for scale and a strip of round, half-green, half-yellow tablets aligned vertically on the right.
Example of the progressive miniaturization of a nitrogen oxide electrochemical cell sensor from a larger microsensor to increasingly smaller microsensor structures.
NASA

The emphasis of this work was on the miniaturization of the sensor based on larger sensor technology. Due to its capability of resisting high temperatures, the sensor could also be extended to applications such as monitoring NOx from a jet engine.

Research at NASA Glenn focused on miniaturizing these sensors as part of a program with the Cleveland Clinic Foundation with funding provided by the Ohio Third Frontier program. Alternate approaches are based on SiC Schottky diodes or other electrochemical cell structures.

Carbon Monoxide Sensing

The detection of carbon monoxide (CO) is necessary for a range of applications. There is a need for improved CO sensors for fire detection and environmental monitoring. CO detection is also of interest in aeronautic emissions applications. NASA Glenn has supported the development of two major types of CO sensor technology: one based on tin oxide (SnO2), and the other based on titanium dioxide (TiO2). Both have been miniaturized for smart sensor applications.

Close-up of a microelectronic sensor. Silver paste connects the heater and thermistor; interdigitated fingers are coated with tin dioxide (SnO₂); and double bond wires link the sensing element to contact pads on either side.
A microfabricated tin oxide sensor designed for detecting carbon monoxide (CO) and nitrogen oxides (NOx).
Case Western Reserve University/C.C. Liu

For example, one CO sensor type uses specially processed tin oxide (SnO2) as the gas sensitive material to ensure stable operation. A standard characteristic of SnO2 is that it undergoes drift at high temperatures due to annealing of the grains. However, nanocrystalline SnO2 provides greater stability and sensitivity at higher temperatures due to its small grain size and large surface area and is thus more useful as a sensor. By doping (through the addition of impurities, such as another element) the SnO2 appropriately, the sensor can be fine-tuned to become more sensitive to either CO or NOx.

Oxygen Sensing

Multiple types of oxygen sensors have been developed using an electrochemical cell platform. This has ranged from sensors that operate at high temperature with zirconia electrolyte to one that runs at room temperature with NAFION electrolyte.

For example, a microfabricated O2 sensor has been developed for safety purposes in aerospace applications, but significant applications also exist in aeronautic emissions control and human health applications.

Conventional oxygen sensors utilize an electrochemical cell containing ZrO2, which conducts oxygen ions at high temperatures. These standard cells are bulky and power consuming. The oxygen sensors developed contain a complete microfabricated electrochemical cell mounted onto a small chip.

The main benefits of this sensor approach include a wider oxygen concentration measurement range, less power consumption, and cheaper production costs.

A circular tray containing an array of small square microchips in a wafer sits next to a U.S. quarter for scale, all placed on a wooden surface.
Microfabricated room temperature O2 sensors batch fabricated in a wafer compared to a quarter.
NASA

A room temperature version of this sensor has been developed using a different electrolyte. NAFION solution doped with water-retaining components are coated on the electrode area to form a conducting electrolyte layer. The sensor is operated under potentiometric mode, which means electrical potential difference was measured between these two electrodes.

Carbon Dioxide Sensing

Research has been on-going to create smaller, cheaper, and more accurate CO2 sensors with a wide temperature range.

Combined with the CO sensors, these devices would have important fire detection applications as well as in aeronautic applications in emissions monitoring and human health monitoring. Similar in basic approach to the oxygen sensors, these CO2 sensors make use of a solid electrochemical cell.

A grid with three small electronic components is displayed next to an Ohio state quarter for scale, all on a blue background.
Carbon dioxide electrochemical cell microsensors.
NASA

In this design, the solid electrolyte used is NASICON (sodium super ionic conductor). Stable and repeatable operation of this sensor has been demonstrated for significant periods of time and improved operation of the sensor has been shown by the addition of nanomaterials. This device is microfabricated to enable the benefits of lower production and operating costs.

Nanoplasmonic Sensing

Nanoplasmonic sensors exploit the phenomenon of “surface plasmon resonance”—coupled electron–electromagnetic wave oscillations a metal–dielectric interface under incident illumination by light. These resonant surface waves have confined/enhanced electric fields, which are highly sensitive to changes in the local dielectric environment, e.g., the binding of a biomolecule or chemical species. The resulting change in dielectric environment is transduced as a shift in the resonance feature. Surface functionalization is required to ensure sensor specificity, and different approaches are used depending on the target application, including polymer-based recognition elements, templated “lock-in-key”/artificial antibody approaches, and bio-affinity interactions (e.g., DNA/RNA hybridization).

A grayscale image showing five rows of evenly spaced, horizontal, rectangular bars on a flat, textured background. The bars appear raised and have a metallic or matte finish.
An SEM image of a nanoplasmonic antenna array sensor.
NASA

A primary goal of this work is to transition this sensing technology out of the lab, where it often relies on lab-based instrumentation (microscope, spectrometer, etc.) for signal excitation and readout, to the portable, field/space-deployable systems. Different sensor geometries have been investigated, which enable integration with on-chip photonic integrated circuits, while maintaining high sensitivity and the other desirable properties of nanoplasmonic sensing.

Benefits of nanoplasmonic sensors for NASA’s mission: low-temperature operation/potential for in-situ measurements (e.g., icy moon/ocean worlds), tailorable recognition elements for a wide range of applications, real-time and label-free operation.

Sensor Arrays

Leak Sensor Array

In leak monitoring of launch vehicles (rockets that carry payloads to space), it is important to detect low concentrations of hydrogen and other fuels to avoid explosive conditions that could harm personnel and damage the vehicle. Dependable launch vehicle operation also relies on the timely and accurate measurement of these leaks. Measuring the levels of hydrogen and hydrocarbons (fuel) and oxygen can indicate whether there is an explosive condition in each region.

A MEMS-based leak detection sensor system that integrates hydrogen, oxygen, and hydrocarbon sensors into a single package has been achieved. The work creates a smart, adaptable system that has the surface area of a postage stamp and can simultaneously measure both fuel and oxygen, transmit data through telemetry, and have low power consumption.

A small electronic circuit board with various components is displayed beside a U.S. flag postage stamp to compare size. The background is a light blue surface.
“Lick and Stick” leak detection smart sensor system.
Makel Engineering Inc.

This smart sensor package contains the required analog and digital electronics, including processing, memory, and communication devices to enable a stand-alone system. This basic hardware approach for hydrogen has been matured for potential implementation on next-generation launch vehicles. The approach is to produce a complete leak detection system that can be placed in several locations. This core smart sensor hardware can also have a range of other applications.

Fire and Environmental Monitoring

Fire detection is extremely important aboard space and commercial aircraft to avoid catastrophic situations and to verify the operational status of the vehicle. Previous false alarm rates from traditional fire detectors were caused by changes in humidity, condensation on the detector’s surface, or contamination from the contents of the vehicle.

The program’s work produced a microsensor array to measure the chemical signature of a fire to provide more reliable fire detection. The carbon monoxide and carbon dioxide sensors are central to this array, and other sensors are included to improve the accuracy of the measured chemical signature providing indications of conditions that can produce false alarms in other detectors.

A black handheld device with a digital screen displays combustion product levels, including carbon dioxide and carbon monoxide. It has two switches and a hose attached and rests on a light blue surface.
Portable Combustion Product Monitoring System.
Makel Engineering Inc.

Some of the same sensors are also of interest for environmental monitoring of a cabin environment. For example, carbon monoxide and carbon dioxide are also core measurements to assure a safe cabin environment, but at different concentrations than needed for fire detection. Modifications to the core carbon monoxide and carbon dioxide sensor technology provide other sensors for this measurement range. The result is a multiparameter sensor array that can be used for both environmental monitoring as well as fire detection.

This fire and environmental monitoring work has produced prototype systems that are both hand-held and stationary. More recent work has involved a prototype wearable monitor for first responders, e.g., wildfire conditions.

Engine Emissions Sensor Array

A high-temperature engine emissions gas sensor array, in effect a high-temperature electronic nose, has been developed to detect a variety of gases of interest for emissions and chemical process monitoring such as hydrocarbons, nitrogen oxides, carbon monoxide, carbon dioxide, and oxygen. Several of these arrays could be placed around the exit of the engine exhaust to monitor the emissions produced by the engine.

The signals produced by this emissions sensor array could be analyzed to determine the constituents of the emission stream, and this information can then be used to control those emissions. This emissions sensor array concept uses materials that are suitable for high-temperature environments and that are composed of different types of microsensor platforms (diodes, resistors, and electrochemical cells) to give a wider range of inputs.

This approach has been demonstrated multiple times at the exhaust of a jet engine, and the data suggests a method for correlating the measurements with the engine’s health state.

A metal pipe with a microfabricated sensor attached. The sensor is indicated by a red arrow and text, “Microfabricated Sensor Location.” The setup includes various wires and cables connected to the pipe.
Rake Sampling System at the outlet of the JT-12 jet engine.
Makel Engineering Inc.

Sensor Applications

Chemical Sensors Family Tree

The approach of this group, its collaborators, and the work in the STTR/SBIR program has been to start with a core set of sample platforms combined with Smart Sensor Systems to address a large range of applications. An example of the approach is shown below with a chemical sensors family tree: one sensor platform can yield the capability to measure multiple chemical species, and the combined platforms have extended versatility.

An example of a chemical sensors family tree.
Makel Engineering Inc.

Applications

This work has led to a vast range of applications. In each case, the chemical sensors and associated hardware have been tailored for the application. The following list outlines where this micro chemical sensor technology has either been demonstrated and applied, or where it is in development.

  • Jet Engine Emissions
  • Aircraft Fire Detection
  • Exercise Monitoring
  • International Space Station Safety System
  • Launch Vehicle Engine Test Stands
  • Environmental Monitoring
  • Cryogenic Fuel Line Monitoring
  • Launch Vehicle Leak Detection
  • Human Health Breath Monitoring
  • First Responder Monitoring
  • Long-Lived Venus Surface Missions and Atmospheric Characterization
  • Hydrogen Powered Aircraft
  • Titan Atmospheric Exploration

Contact

Area of ExpertiseNameEmail
Chemical SensorsGary Huntergary.w.hunter@nasa.gov
Chemical SensorsJennifer Xujennifer.c.xu@nasa.gov
Sensor ApplicationsJohn Wrbanekjohn.d.wrbanek@nasa.gov

NASA Glenn facilities where this research is conducted:

Microsystems Fabrication Laboratory

This vertically integrated silicon carbide (SiC) semiconductor research and development facility is dedicated to the design, fabrication, and testing of integrated circuit electronics and sensors uniquely durable to extreme environments. 

Learn More about Microsystems Fabrication Laboratory
The Microsystems Fabrication Laboratory designs, fabricates, packages, and tests uniquely durable extreme environment silicon carbide (SiC) sensors and electronics.
The Microsystems Fabrication Laboratory designs, fabricates, packages, and tests uniquely durable extreme environment silicon carbide (SiC) sensors and electronics.
NASA

Key Publications

Publication TitleAuthor(s)SourceTypeYear
High Temperature Smart Sensor Systems for Venus and Aerospace Applications (Invited)Gary W. Hunter, Darby Makel, Susana Carranza, and Jennifer Xu18th International Meeting on Chemical Sensors, Virtual Meeting, USA, May 30th – June 3rd 2021Presentation2021
Critical Review of Solid State Gas Sensors (Editors’ Choice)G. W. Hunter, C.C. Liu, P. Hesketh, S. Akbar, D. Miller, J. Stetter, C. E. Davis, R. Ramasamy, and A. R. HillmanJournal of The Electrochemical Society, 2020 167 037570Journal Article2020
Mode Switching with Waveguide-Coupled Plasmonic NanogratingsT. Palinski, B. Vyhnalek, G. Hunter, A. Tadimety, J. ZhangIEEE Journal of Selected Topics in Quantum ElectronicsJournal Article2020
Development of 700 C Capable Chemical Sensors for Engine Emissions Testing and Embedded Instrumentation ApplicationsDarby B. Makel, Susana Carranza, Gary W. Hunter and Jennifer C. Xu66th JANNAF Propulsion Meeting, Dayton OH, June 3-7, 2019Presentation2019
Smart Sensor Platforms and Systems for Aerospace ApplicationsGary W. Hunter, Darby B. Makel, and Jennifer C. Xu17th International Meeting on Chemical Sensors, Vienna, Austria, July 2018 (Invited Talk)Presentation2018
Hydrogen Sensing in Titan’s Atmosphere: Motivations and TechniquesRalph D. Lorenz, Hiroshi Imanaka, Christopher P. McKay, Darby Makel, Gary W. Hunter, Melissa P. Trainer, Robert Osiander, Andrew Mastandrea, Jason W. Barnes, Elizabeth P. TurtlePlanetary and Space Science, Volume 174, 15, Pages 1-7, 2019Journal Article2019
Engine Emissions Monitoring System Development for Engine Health ManagementGary W. Hunter, Susana Carranza, Darby B. Makel, Donald L. Simon, and Jennifer C. XuProceedings of the JANNAF 48th Combustion December Meeting, New Port News, VA, December 2018Presentation2018
Portable Breath Monitoring: A New Frontier in Personalized Health CareGary W. Hunter, Raed A. Dweik, Darby B. Makel, Claude C. Grigsby, Ryan S. Mayes,and Cristina E. DavisInterface Magazine, Volume 25, Issue 4, Winter 2016Article2016
Aircraft Ground Demonstration of Engine Emissions Monitoring System Based on a Gas Microsensor ArrayGary W. Hunter; Donald L. Simon; Jennifer C. Xu; Azlin Biaggi-Labiosa; Susana Carranza; and Darby MakelAIAA-2014-3925, 50th AIAA/ASME/SAE/ASEE Joint Propulsion Conference, July 28 to 30, 2014, Cleveland, OHPresentation2014
Design, fabrication, and testing of MEMS-based miniaturized potentiometric nitric oxide sensorsC.W. Chang, G. Maduraiveeran, J.C. Xu, G.W. Hunter, and P.K. DuttaSensors and Actuators B: Chemical, Volume 204, 1 December 2014, Pages 183-189Journal Article2014
A Concept of Operations for An Integrated Vehicle Health Assurance SystemGary W. Hunter, Richard W. Ross, David E. Berger, John D. Lekki, Robert W. Mah, Daniel F. Perey, Stefan R. Schuet, Donald L. Simon, Stephen W. Smith and Richard W. RossNASA/TM 2013 217825, February, 2013NASA TM2013
Nanostructured Material Sensor Processing Using Microfabrication TechniquesG. W. Hunter, R. L. Vander Wal, L. J. Evans, J.C. Xu, G. M. Berger, M. J. Kullis, and A. M. Biaggi-LabiosaSensor Review, Vol. 32 Issue 2, pg. 106-117, 2012Journal Article2012
Development of High Temperature SiC Based Hydrogen/Hydrocarbon Sensors with Bond Pads for PackagingJennifer C. Xu, Gary. W. Hunter, L-Y. Chen, Azlin M. Biaggi-Labiosa, Benjamin J. Ward, Dorothy Lukco, Jose M. Gonzalez III, Peter S. Lampard, Michael A. Artale, and Christopher L. HamptonMaterials Science Forum, Vol. 717-720, pg. 1191, May 2012Journal Article2012
Smart Sensor SystemsG. W. Hunter, J. R. Stetter, P. J. Hesketh, and C. C. LiuInterface, Vol. 19, No. 4, Winter 2011, pp. 29-33Article2011
Smart Sensor Systems for Spacecraft Fire Detection and Air Quality MonitoringG. W. Hunter, J. C. Xu, A. M. Biaggi-Labiosa, B. Ward, P. Dutta, and C. C. Liu40th International Conference On Environmental Systems, AIAA: Portland, Oregon, 2011; Vol. AIAA 2011-5021Conference Proceedings2011

Key Patents

Patent TitleInventor(s)YearPatent #
Polymer electrolyte-based sensorsG. W. Hunter, J. C. Xu, and C. C. Liu201910444180
Gas sensors with contact padsJ. C. Xu and G. W. Hunter20189970914
Processing of nanostructured devices using microfabrication techniquesG. W. Hunter, J. C. Xu, L. J. Evans, M. H. Kulis, G. M. Berger, and R. L. Vander Wal20148877636
Carbon dioxide gas sensors and method of manufacturing and using sameG. W. Hunter and J. C. Xu20148702962
Carbon dioxide gas sensors and method of manufacturing and using sameG. W. Hunter, J. C. Xu, C. C. Liu, and B. J. Ward20118052854
Miniaturized metal (metal alloy)/ PdOx/SiC hydrogen and hydrocarbon gas sensorsG.W. Hunter, J.C. Xu and D. Lukco.20118001828
Miniaturized metal (metal alloy)/ PdOx/SiC hydrogen and hydrocarbon gas sensorsG. W. Hunter, J. C. Xu, and D. Lukco20087389675
Gas sensors using SiC semiconductors and method of fabrication thereofG. W. Hunter and P. G. Neudeck20046763699
Gas sensing diode comprising SiCG. W. Hunter20016291838
Gas sensing diode and method of manufacturingG. W. Hunter20006027954
Method and apparatus for the detection of hydrogen using a metal alloyG. W. Hunter19975668301

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