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Glenn Scientists Build on Flat Technology for Better Semiconductors

thumbnail Image file name: WebGrowth.jpg
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Caption: A flattened and enlarged silicon carbide mesa. The lighter, vee-shaped sections are the webbed material that was grown between the legs of the darker, plus-sign-shaped original mesa.
Credit: Courtesy NASA Glenn

thumbnail Image file name: Hetero.jpg
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Caption: Cubic silicon carbide films on flattened mesas, after thermal oxidation that reveals crystal defects. The defect-free film shown on the right was made using step-free surface heteroepitaxy.
Credit: Courtesy NASA Glenn


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