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Links to broadcast quality audio files and transcripts -- Dr. Meyya Meyyappan, NASA Ames Research Center, Moffett Field, Calif. interviewed about using carbon nanotubes as 'iuterconnects' in integrated circuits or 'silicon chips.' Issued April 14, 2003.

Question 8. What do carbon nanotubes look like under the electron microscope?

The audio recording is 2:24 minutes

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Full Transcript (below)


8. What do carbon nanotubes look like under the electron microscope? (2:24 minutes)

Dr. Meyya Meyyappan: "The carbon nanotubes, as prepared for interconnects by our technology, if you take a look at them under the electron microscope from the top, you will see a series of dots in a pre-specified pattern. And if you look from the front, they will look like a sequence of lamp poles or trees – vertical trees -- arranged in a pre-specified pattern in a forest. And the important difference between the process technology we introduce and the existing way of doing things is very significant in the success of this process. In the existing way, in order to create a copper interconnect, one creates – so to speak – a trench or a hole in the insulator. The problem with that is as we go through the next few generations, we anticipate that these holes are going to be getting more and more narrow, and deeper. So, trying to create a very narrow, but very deep hole, using a technique called plasma etching, that is becoming increasingly challenging. And our approach completely discards the need to create those kind of holes. What we do is instead of creating the hole is then filling it later on, we first put the carbon nanotube as an interconnect using plasma deposition. And then we fill the space around it. So, so to speak, we reverse the approach because creating a hole and filling it is very difficult. On the other hand, you grow the material and fill that wide around. That is somewhat easier. So, that is the novelty here. And it may appear to be subtle at the beginning, but when we are talking about manufacturing things at nanoscale, even these kind of differences are going to be the difference between making it and not making it. "

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